Multi-laser Process for Fast Fabrication of Nanocrystalline

Market Overview:

Semiconducting metal oxide (SMO) gas sensors have been developed for a wide range of applications such as safety monitoring, environmental sending, and medical diagnostics. 1D nanocrystalline SMO has shown great gas sensing response since their microstructure can facilitate surface reactions. However, the fabrication process of SMO gas sensors such as thermal evaporation, hydrothermal synthesis, or pulsed laser deposition are complicated and time consuming. The gas sensors market is projected to grow to $1.4 billion by 2024, at a CAGR of 6.4% from 2019 to 2024. Clemson University researchers have developed a multi-laser process for the fast fabrication of nanocrystalline SMO gas sensors that integrates three laser processing technologies: circuit fabrication, SMO deposition and in situ post-annealing.


Application                                                                   Stage of Development

Fast Fabrication, Nanocrystalline SMO,                     Proof of concept

Gas Sensors, Precise Deposition



  • Much faster fabrication time than other methods
  • Precise deposition area control, no need for fine tuning
  • Allows for flexible material properties control


Technical Summary

This process is integrated with three laser processing technologies. Predesigned circuit patterns were fabricated on an Au-coated transparent glass substrate using a picosecond laser, which ablated the Au-coating from the back of the substrate to pattern the circuits. A picosecond laser transmits through the glass substrate at the gaps between two electrodes to ablate a SMO target to deposit the SMO nanonetwork layer on the fabricated circuits. The obtained SMO nanonetwork was in-situ post-annealed by a CO2 laser to fine-tune the crystallinity.

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Inventor:                      Hai Xiao

Patent Type:                  N/A

Serial Number:             N/A

CURF Ref No:              2020-034

Patent Information:
For Information, Contact:
Chase Kasper
Business Development
Clemson University Research Foundation
Hai Xiao
Jincheng Lei
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